Taiwan Semiconductor Manufacturing Co. (TSMC) has installed ASML's extreme ultraviolet (EUV) lithography machine, which is crucial to the development of 10-nanometer process technology for semiconductor manufacturing. ASMLis a leading supplier of lithography systems for the semiconductor industry. The company says it has already landed orders for 11 EUV machines worldwide.

The EUV machines could help TSMC overcome physical limits to migrate to 10nm process technology and below.

Dutch ASML believes that iuts customers will begin pilot production using 10nm process technology by the end of this year and volume production using the technology by 2016.

The EUV lithography system is available at a "prohibitive" price tag more than US$100 million.

Samsung, Intel and IBM are also ASML's customers for EUV machines.

Samsung, Intel and TSMC have all invested in ASML.