16nm |
Technology features |
Process |
FinFET, HKMG, Dual-Oxide, Cu/LK |
Digital |
Core & I/O, multi-Vt |
Analog |
High-R, Varator, BJT, FMOM |
Memory |
6T (HD,HC, HP), 2P-8T, DP SRAM, ROM |
Chip ID/ repair |
Electrical fuse |
LC-Tank |
Inductor, RF-Varactor, RF-MOM |
De-Cap |
HD-MiM, MOSCAP |
ESD |
Gated-diode, STI-diode, Snapback MOS |