Oerlikon Systems, a supplier of PVD sputter systems, today announced that it has received a multiple tool purchase order from the world?s largest semiconductor foundry for its CLUSTERLINE 300II systems.
These contracts augment recent orders received from key semiconductor manufacturers in South Korea and Taiwan for the same CLUSTERLINE 300mm systems aimed at the packaging market, the company said.
The CLUSTERLINE 300II is a cluster tool specifically designed for advanced packaging and backside metallization (for wafer sizes up to 300mm) .
Oerlikon is a Swiss industrial group specializing in machine and plant engineering. The Company is a provider of industrial solutions and technologies for textile manufacturing, thin-film coating, drive, vacuum, solar energy systems and advanced nanotechnology. Oerlikon Systems offers thin film deposition systems and processes to three key markets: Semiconductors ? with applications for advanced packaging, hard disk read/write heads, LEDs, Micro-Electro-Mechanical Systems (MEMS)