Thursday, February 11, 2016
Search
  
Submit your own News for
inclusion in our Site.
Click here...
Breaking News
Samsung Showcases Latest Monitors, TVs, Smartpwatch And Tablet At 2016 European Forum
Qualcomm Announces Three New Snapdragon Processors, Wear Platform And First Gigabit Class LTE Modem
TSMC Wins Exclusive Chip Contract For Next iPhone: report
LG Introduces Touch-Enabled Quick Phone Cover For LG G5 Smartphone
Oculus Starts Offering Discounted Computers To Early Virtual Reality Adopters
Archos 50d Oxygen Launching At MWC
Chip Makers Differientate In terms Of Equipment Investments
New Plextor M6S Plus SSDs Released
Active Discussions
Which of these DVD media are the best, most durable?
How to back up a PS2 DL game
Copy a protected DVD?
roxio issues with xp pro
How to burn a backup copy of The Frozen Throne
Help make DVDInfoPro better with dvdinfomantis!!!
Copied dvd's say blank in computer only
menu making
 Home > News > General Computing > Toshiba...
Last 7 Days News : SU MO TU WE TH FR SA All News

Wednesday, November 18, 2009
Toshiba Showcases The World's First Application in 20nm Generation Process technology


Toshiba has developed a high resolution photoresist (photo-sensitive film) essential for future application of EUV (extreme ultraviolet) lithography in semiconductor fabrication, and proved its viability with the world's first 20nm-scale generation process technology.

This achievement will be announced at 22nd International Microprocesses and Nanotechnology Conference on November 19.

When semiconductors circuit patterns scale down into the 20nm-scale generation, current photoresists will no longer resolve circuit patterns precisely, resulting in roughness in pattern sidewalls. The biggest factor is that conventional photoresists consist of polymer compounds. While such compounds are easier to spin-cast on wafers, the size of their molecules and entangling of their molecular chains limit resolution. To overcome this, Toshiba has developed a photoresist with smaller molecular compounds.

Once a photoresist is exposed to light, it is removed from the substrate with a developer solution in one of two ways, positive tone and negative tone. In positive-tone development, the area exposed to the light source is removed from the wafer (i.e. that part of the photoresist becomes more soluble), leaving a channel. In negative-tone development, the area that has not been exposed to the light source is removed from the wafer (i.e, that part of the photoresist becomes more soluble), leaving a raised area. Application of both processes is essential for etching wafers.

Toshiba identified truxene, a material with a fine, durable structure, as a candidate material. The company has established the fundamental composition of a truxene derivative for photoresist, and demonstrated its use as a positive-tone photoresist in EUV generation. Moving beyond this, Toshiba has now demonstrated its application as a higher resolution negative-tone photoresist in 20nm-scale generation. Photoresists must be able to support both positive- and negative-tone processes in the lithography process, and Toshiba has how established basic technology for both.

Toshiba said it would further improve the performance of the molecular resist and apply it to the fabrication of 20nm-scale generation LSIs. According to the International Technology Roadmap for Semiconductors (ITRS), high volume production of this generation is expected to start in 2013.


Previous
Next
Samsung Introduces New Multimedia Player R0 in Korea        All News        PS3, Xbox 360, Integrate Facebook
Google and Bing Gain popularity Among Internet Users     General Computing News      Microsoft Launches Windows Azure Platform

Get RSS feed Easy Print E-Mail this Message

Related News
Toshiba To Wind Down Its Hard Disk Business
Toshiba Develops STT-MRAM Magnetic Cache Memory, Wireless Receiver For Bluetooth Low Energy
Toshiba To Focus On Memory Chips, Phase Out Hard Disk Manufacturing
Toshiba PX04SL SAS eSSD Series Now Available
CES: Toshiba Launches The dynaPad 12-Inch Tablet Powered by Windows
Toshiba Unveils Restructuring Plan
Toshiba To Shutter Its Overseas TV Business
Toshiba Faces $60 Million Fine
Toshiba, Fujitsu, Vaio In Talks To Merge Their PC Businesses
Toshiba Takes Former Executives To Court
Toshiba To Sell Image Sensor Business to Sony
Toshiba and SanDisk Start Equipment Installation at Yokkaichi’s New Fab 2

Most Popular News
 
Home | News | All News | Reviews | Articles | Guides | Download | Expert Area | Forum | Site Info
Site best viewed at 1024x768+ - CDRINFO.COM 1998-2016 - All rights reserved -
Privacy policy - Contact Us .